Theoretical investigation of the thermodynamic properties of metallic thin films

被引：15

作者：

Vu Van Hung

Duong Dai Phuong ^{[1
]}

Nguyen Thi Hoa ^{[2
]}

Ho Khac Hieu ^{[3
]}

机构：

[1] Hanoi Natl Univ Educ, Hanoi, Vietnam

[2] Univ Transport & Commun, Hanoi, Vietnam

[3] Duy Tan Univ, Inst Res & Dev, Danang, Vietnam

来源：

THIN SOLID FILMS | 2015年 / 583卷

关键词：

Metallic thin films; Thermodynamic properties; Specific heats; Anharmonicity; Statistical moment method; ELASTIC PROPERTIES; THERMAL-EXPANSION; MODULUS; STRESS; COEFFICIENT; SI;

D O I：

10.1016/j.tsf.2015.03.040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The thermodynamic properties of metallic thin films with face- centered cubic structure at ambient conditions were investigated using the statistical moment method including the anharmonicity effects of thermal lattice vibrations. The analytical expressions of Helmholtz free energy, lattice parameter, linear thermal expansion coefficient, specific heats at the constant volume and constant pressure were derived in terms of the power moments of the atomic displacements. Numerical calculations of thermodynamic properties have been performed for Au and Al thin films and compared with those of bulk metals. This research proposes that thermodynamic quantities of thin films approach the values of bulk when the thickness of thin film is about 70 nm. (C) 2015 Elsevier B.V. All rights reserved.

引用

页码：7 / 12

页数：6

共 18 条

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