Fabrication and applications of the optical diamond-like carbon films: a review

被引:30
作者
Lu, Yimin [1 ]
Wang, Sai [2 ]
Huang, Guojun [2 ]
Xi, Lin [1 ]
Qin, Guanghu [1 ]
Zhu, Mengzhen [2 ]
Chu, Hua [2 ]
机构
[1] Anhui Polytech Univ, Sch Mech Engn, Wuhu 241000, Peoples R China
[2] Army Engn Univ, Ordnance NCO Acad, Wuhan 430075, Peoples R China
关键词
REFRACTIVE-INDEX SENSITIVITY; DLC FILMS; MECHANICAL-PROPERTIES; THIN-FILMS; VISIBLE PHOTOLUMINESCENCE; ELECTRICAL-PROPERTIES; NICKEL INCORPORATION; PROTECTIVE-COATINGS; SOLAR-CELLS; PECVD;
D O I
10.1007/s10853-021-06818-w
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Optical diamond-like carbon films applied in the optical and opto-electronical fields are paid attention in this review. Based on the reported experimental data during the last decade primarily, influence of sp(3) hybridized bond on the optical bandgap and optical constant of the optical diamond-like carbon film is discussed. Effect of ambient gas and doping materials on the optical and opto-electronical properties of diamond-like carbon films is also studied according to the reported references. As an emphasis, various applications of the optical diamond-like carbon coatings are reviewed. Excellent protective performance of the diamond-like carbon films in the optical field is attributed to its high hardness, good chemical inertness, low friction, along with the necessary broadband transparence. Diamond-like carbon film is also an efficient ITO-free transparent electrode for photovoltaic applications, which is resulted from their unique microstructural, mechanical, electrical, and optical properties. Optical diamond-like carbon thin film can also be used as the luminous material to extend the emission peak.
引用
收藏
页码:3971 / 3992
页数:22
相关论文
共 171 条
[1]   Studying the effects of plasma produced species on the optical characteristics and bonding structure of diamond-like carbon films deposited by direct current unbalanced magnetron sputtering [J].
Abadi, Saeid Khodadadi Najaf ;
Hosseini, Seyed Iman ;
Momeni, Mandi ;
Khaksaran, Hadi .
MATERIALS CHEMISTRY AND PHYSICS, 2019, 229 :348-354
[2]   Electron cyclotron resonance deposition, structure, and properties of oxygen incorporated hydrogenated diamondlike amorphous carbon films [J].
Adamopoulos, G ;
Godet, C ;
Zorba, T ;
Paraskevopoulos, KM ;
Ballutaud, D .
JOURNAL OF APPLIED PHYSICS, 2004, 96 (10) :5456-5461
[3]   Optical and electrical properties of synthesized reactive rf sputter deposited boron-rich and boron-doped diamond-like carbon thin films [J].
Ahmad, A. A. .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2017, 28 (02) :1695-1705
[4]   Visible photoluminescence from silicon-incorporated diamond like carbon films synthesized via direct current PECVD technique [J].
Ahmed, Sk F. ;
Banerjee, D. ;
Mitra, M. K. ;
Chattopadhyay, K. K. .
JOURNAL OF LUMINESCENCE, 2011, 131 (11) :2352-2358
[5]   An updated overview of diamond-like carbon coating in tribology [J].
Al Mahmud, K. A. H. ;
Kalam, M. A. ;
Masjuki, H. H. ;
Mobarak, H. M. ;
Zulkifli, N. W. M. .
CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 2015, 40 (02) :90-118
[6]  
ALAM M, 2018, AIP CONF P, V1953
[7]   Correlation of acetylene plasma discharge environment and the optical and electronic properties of the hydrogenated amorphous carbon films [J].
Aldeeb, Mustafa A. ;
Morgan, Nasser ;
Abouelsayed, A. ;
Amin, Khaled M. ;
Hassaballa, Safwat .
DIAMOND AND RELATED MATERIALS, 2019, 96 :74-84
[8]   Synthesis of high hardness IR optical coating using diamond-like carbon by PECVD at room temperature [J].
Ankit, K. ;
Varade, Ashish ;
Reddy, Niranjan K. ;
Dhan, Sarmistha ;
Chellamalai, M. ;
Balashanmugam, N. ;
Krishna, Prasad .
DIAMOND AND RELATED MATERIALS, 2017, 78 :39-43
[9]   Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies [J].
Auciello, Orlando ;
Aslam, Dean M. .
JOURNAL OF MATERIALS SCIENCE, 2021, 56 (12) :7171-7230
[10]   Fabrication of Transparent Protective Diamond-Like Carbon Films on Polymer [J].
Baek, Sang-min ;
Shirafuji, Tatsuru ;
Saito, Nagahiro ;
Takai, Osamu .
JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (08)