A metal lift-off process through hyperbolic undercut of laser heat-mode lithography

被引：10
作者：
Wang, Zhengwei [1 ,2 ]
Zhang, Kui [1 ,2 ]
Chen, Guodong [1 ,2 ]
Zhu, Zhendong [3 ]
Wang, Yang [1 ,2 ]
Wei, Jingsong [1 ,2 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Lab Micronano Optoelect Mat & Devices, Shanghai 201800, Peoples R China
[2] Univ Chinese Acad Sci, Ctr Mat Sci & Optoelect Engn, Beijing 100049, Peoples R China
[3] Natl Inst Metrol, Beijing, Peoples R China
来源：
MATERIALS LETTERS | 2020年 / 264卷
基金：
中国国家自然科学基金;
关键词：
Thin films; Microstructure; Lift-off; Lithography; PATTERN COLLAPSE;
D O I：
10.1016/j.matlet.2020.127344
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Laser heat-mode lithography is an important method for the fabrication of micro and nanostructure. A metal lift-off method through hyperbolic undercut of laser heat-mode lithography was proposed. In this method, a desirable hyperbolic undercut profile was used to replace the inverted trapezoid undercut, and the hyperbolic undercut profile can be obtained through laser heat-mode lithography technique. Cr structures of gratings, grids and planar spiral inductor with a minimum linewidth of 0.42 mu m and a height of 100 nm were obtained successfully. These indicate that the lift-off process through hyperbolic undercut of laser heat-mode lithography can be used to fabricate the submicron metal structures. (C) 2020 Elsevier B.V. All rights reserved.
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页数：5
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