Some aspects of SEM profilometry in the backscattering electron mode

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作者：
Dreomova, NN
Rau, EI
Yakimov, EB
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IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 1996年 / 60卷 / 02期
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O4 [物理学];
学科分类号：
0702 ;
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页码：101 / 104
页数：4
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