Diffusion bonding of silicon nitride to titanium

被引:10
作者
Lemus, J [1 ]
Drew, RAL [1 ]
机构
[1] McGill Univ, Dept Min & Met Engn, Montreal, PQ H3A 2B2, Canada
来源
BRITISH CERAMIC TRANSACTIONS | 2000年 / 99卷 / 05期
关键词
D O I
10.1179/096797800680947
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Si3N4/Ti and Si3N4/Ti/Si3N4 combinations were joined by solid state diffusion bonding using hot pressing at temperatures ranging from 1200 to 1500 degreesC. The microstructure of the resulting interfaces was characterised by scanning electron microscopy electron probe microanalysis, and XRD. Si3N4/Ti samples hot pressed at temperatures less than 1400 degreesC could not be bonded. However, at 1400 degreesC bonding of single joints occurred, although the samples debonded during SEM preparation. Hot pressing at 1500 degreesC resulted in effective joining by the formation of a reactive interface. For Si3N4/Ti/Si3N4 sandwich samples hot pressed at 1400 and 1500 degreesC, successful joining of Si3N4 to Ti occurred by the formation of an interface on the Ti side. The surface roughness of the joint materials plays an important role, affecting the thickness of the reaction products. The interfaces grew in a parabolic fashion with the formation of various titanium silicides (Ti5Si3 and TiSi) as well as titanium nitride (TiN).
引用
收藏
页码:200 / 205
页数:6
相关论文
共 16 条
[1]  
BALE CW, 1996, FACT USER MANUAL
[2]   PHASE-EQUILIBRIA IN THIN-FILM METALLIZATIONS [J].
BEYERS, R ;
SINCLAIR, R ;
THOMAS, ME .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04) :781-784
[3]   INTERFACE FORMATION AND STRENGTH IN CERAMIC-METAL SYSTEMS [J].
DALGLEISH, BJ ;
SAIZ, E ;
TOMSIA, AP ;
CANNON, RM ;
RITCHIE, RO .
SCRIPTA METALLURGICA ET MATERIALIA, 1994, 31 (08) :1109-1114
[4]  
GOU H, 1996, WELD WORLD, V37, P107
[5]  
NICHOLAS MG, 1985, MATER SCI TECH SER, V1, P657, DOI 10.1179/026708385790124305
[6]  
NICHOLAS MG, 1990, JOINING CERAMICS, P113
[7]   INTERFACIAL STRUCTURE OF METAL CERAMIC JOINTS [J].
OKAMOTO, T .
ISIJ INTERNATIONAL, 1990, 30 (12) :1033-1040
[8]  
PAGE TF, 1992, FUTURE DEV METALS CE, P121
[9]  
RICE RW, 1995, AM CERAM SOC B, V75, P751
[10]  
Richerson DW., 1992, MODERN CERAMIC ENG