Melt motion during liquid-encapsulated Czochralski crystal growth in steady and rotating magnetic fields

被引:7
|
作者
Yang, Mei
Ma, Nancy
Bliss, David F.
Bryant, George G.
机构
[1] N Carolina State Univ, Dept Mech & Aerosp Engn, Raleigh, NC 27695 USA
[2] USAF, Geophys Lab, Sensors Directorate, AFRL SNHC, Bedford, MA 01731 USA
关键词
semiconductor crystal growth; numerical modelling; magnetic fields; electromagnetic stirring; liquid encapsulated czochralski method; single crystal growth;
D O I
10.1016/j.ijheatfluidflow.2006.08.001
中图分类号
O414.1 [热力学];
学科分类号
摘要
During the liquid-encapsulated Czochralski (LEC) process, a single compound semiconductor crystal such as gallium-antimonide is grown by the solidification of an initially molten semiconductor (melt) contained in a crucible. The motion of the electrically-conducting molten semiconductor can be controlled with externally-applied magnetic fields. A steady magnetic field provides an electromagnetic stabilization of the melt motion during the LEC process. With a steady axial magnetic field alone, the melt motion produces a radially-inward flow below the crystal-melt interface. Recently, an extremely promising flow phenomenon has been revealed in which a rotating magnetic field induces a radially-inward flow below the crystal-melt interface that may significantly improve the compositional homogeneity in the crystal. This paper presents a model for the melt motion during the LEC process with steady and rotating magnetic fields. (c) 2006 Elsevier Inc. All rights reserved.
引用
收藏
页码:768 / 776
页数:9
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