Performance Analysis of Microsystems in the Presence of Pull-In Instability

被引：0

作者：

Ghiasi, Emran Khoshrouye ^{[1
]}

机构：

[1] Ferdowsi Univ Mashhad, Dept Mech Engn, Mashhad, Iran

来源：

2015 2ND INTERNATIONAL CONFERENCE ON KNOWLEDGE-BASED ENGINEERING AND INNOVATION (KBEI) | 2015年

关键词：

Micro-beam; Pull-in instability; Reynolds equation; Dimensionless variables; ELECTRICALLY ACTUATED MICROBEAM; MICROELECTROMECHANICAL SYSTEMS; SQUEEZE-FILM; MEMS;

D O I：

暂无

中图分类号：

TP39 [计算机的应用];

学科分类号：

081203 ; 0835 ;

摘要：

Objective of the current work is to represent performance analysis of microsystems in the presence of pull-in instability phenomenon. To this end, the Euler-Bernoulli beam theory, and non-linear Reynolds equation are considered, and the generalized differential quadrature method (GDQM) is employed to solve the nonlinear partial differential governing equations. A parametric study conducted, focusing on the combined effects of geometric non-linearity, Squeeze-film damping (SQFD), distributed load, inertial gap, and material properties. The results reveal that the pull-in instability of poly silicon micro-beam is strongly size-dependent. It is also demonstrated that neglecting pressure in Reynolds equation will cause smaller values in pull-in time.

引用

页码：95 / 100

页数：6

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