共 24 条
[1]
BINDER H, 1969, AM CHEM SOC DIV FUEL, V13, P99
[2]
BOEHM H, 1968, BER AEG TELEFUNKEN, V41, P46
[4]
W and WC layers deposition by shielded inductively coupled plasma source
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2002, 20 (05)
:1632-1638