Characterization of anti-reflection structures fabricated via laser micro/ nano-processing

The optical reflection properties of material surfaces are crucial for the performance of many optical and optoelectronic devices. In this study, different single-scale surface structures, e.g., gratings, holes, and cones were fabricated via laser micro/nano-processing and their optical properties were determined. The anti-reflection mechanism for these surface structures was revealed visually by using a ray-tracing algorithm and wave optics calculations. To fully exploit the advantages of single-scale nanostructures or microstructures, a novel preparation method for multi/scale structures was proposed. It not only improves absorption efficiency, but also broadens the absorption spectrum. Moreover, a substantial improvement of the infrared anti-reflection performance was realized. In addition, the relationship between the characteristic of surface structure and the spectral region in response to incident light, was established.