A very accurate measurement system for multielectrode capacitive sensors

被引：25
作者：
Toth, FN
Meijer, GCM
Kerkvliet, HMM
机构：
[1] Faculty of Electrical Engineering - DIMES, Delft University of Technology, 2628 AG Delft
来源：
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT | 1996年 / 45卷 / 02期
关键词：
D O I：
10.1109/19.492781
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A very accurate capacitance-measurement system consisting of a discrete capacitance-dependent oscillator and a microcontroller has been developed, It can measure multielectrode capacitors with capacitances up to 2 pF, with an accuracy of 100 ppm with respect to a reference capacitor. The resolution amounts to 50 aF with a total measurement time of 300 ms.
引用
收藏
页码：531 / 535
页数：5
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