Quasi-static design technique for mm-wave micromachined filters with lumped elements and series stubs

被引:21
作者
Weller, TM [1 ]
Herrick, KJ [1 ]
Katehi, LPB [1 ]
机构
[1] UNIV MICHIGAN,RADIAT LAB,ANN ARBOR,MI 48109
关键词
coplanar waveguide; coupled lines; filters; micromachining; millimeter wave;
D O I
10.1109/22.588605
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper describes micromachined, membrane-supported low-pass and bandpass filters which are suitable for microwave and millimeter-wave (mm-wave) application, The designs are realized in coplanar-waveguide (CPW) form using short- and open-end series stubs with integrated metal-insulator-metal (MIM) capacitors, and are compact in lateral and longitudinal dimensions, A computationally efficient analysis has been developed for the design and characterization of the filters, The technique is based on a quasi-static coupled-line (CL) treatment of the series stubs, and uses normal mode impedance parameters, which are calculated with the spectral-domain approach (SDA), Due to the broad TEM-bandwidth of the membrane-supported transmission lines, the method can accurately predict filter responses well into the rejection band, To demonstrate the above claims, the measured and simulated S-parameters of a 0.3 mm x 2.2 mm low-pass Alter with a cutoff frequency at 17 GHz, and a second passband at 115 GHz, are presented, The new approach is also used in the design of bandpass filters which exhibit 1.5-2-dB insertion loss and bandwidths around 10%.
引用
收藏
页码:931 / 938
页数:8
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