Realization of binary radial diffractive optical elements by two-photon polymerization technique

被引：13
|
作者：
Osipov, Vladimir [1 ]
Pavelyev, Vladimir [2 ,3 ]
Kachalov, Denis [3 ]
Zukauskas, Albertas [1 ]
Chichkov, Boris [1 ]
机构：
[1] Laser Zentrum Hannover EV, D-30419 Hannover, Germany
[2] Image Proc Syst Inst RAS, Samara 443001, Russia
[3] Samara State Aerosp Univ, Samara 443086, Russia
来源：
OPTICS EXPRESS | 2010年 / 18卷 / 25期
关键词：
RESOLUTION; MICROFABRICATION; DESIGN; AXICON; DEPTH;
D O I：
10.1364/OE.18.025808
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Application of the two-photon polymerization (2PP) technique for the fabrication of submicron-size relief of radial binary diffractive optical elements (DOE's) is studied. Binary DOE's for the formation of special longitudinal intensity distribution (axial light segment) are realized. Interferometric investigations of the diffractive relief produced by the 2PP-technique and investigations of optical properties of the formed elements are presented. Results of computer simulations are in good agreement with the experimental observations. (c) 2010 Optical Society of America
引用
收藏
页码：25808 / 25814
页数：7
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