Preparation, morphology, and ultra-low dielectric constants of benzoxazine-based polymers/polyhedral oligomeric silsesquioxane (POSS) nanocomposites

Nanocomposites of benzoxazine-based polymers/polyhedral oligomeric silsesquioxane (PUSS) have been prepared through copolymerization of furan-containing benzoxazine compounds and methyl-methacrylate-POSS (MMA-POSS). Nanocomposites having MMA-POSS fractions of 0-70 wt% (PUSS fractions of 0-28 wt%) are obtained. The high contents of MMA-POSS of the nanocomposites result in a reduction of their dielectric constants to 2.3. Moreover, some nanocomposites display PUSS orientation into lamellar structures in nanometer sizes. The PUSS orientation further reduces the dielectric constants of the nanocomposites to about 1.9. Hence, the prepared nanocomposites could be used as ultra-low-k materials for advanced microelectronics. (C) 2010 Elsevier Ltd. All rights reserved.