Microoptoelectromechanical systems-based external cavity quantum cascade lasers for real-time spectroscopy

被引：21

作者：

Butschek, Lorenz ^{[1
]}

Hugger, Stefan ^{[1
]}

Jarvis, Jan ^{[1
]}

Haertelt, Marko ^{[1
]}

Merten, Andre ^{[2
]}

Schwarzenberg, Markus ^{[2
]}

Grahmann, Jan ^{[2
]}

Stothard, David ^{[3
]}

Warden, Matthew ^{[3
]}

Carson, Christopher ^{[3
]}

Macarthur, John ^{[3
]}

Fuchs, Frank ^{[1
]}

Ostendorf, Ralf ^{[1
]}

Wagner, Joachim ^{[1
]}

机构：

[1] Fraunhofer Inst Appl Solid State Phys IAF, Dept Optoelect, Freiburg, Germany

[2] Fraunhofer Inst Photon Microsyst IPMS, Dept Act Microopt Devices & Syst, Dresden, Germany

[3] Fraunhofer Ctr Appl Photon, Glasgow, Lanark, Scotland

来源：

OPTICAL ENGINEERING | 2018年 / 57卷 / 01期

基金：

欧盟地平线“2020”;

关键词：

quantum cascade laser; microoptoelectromechanical systems; external cavity laser; mid-IR spectroscopy; real-time spectroscopy; RESOLUTION;

D O I：

10.1117/1.OE.57.1.011010

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We report on mid-IR spectroscopic measurements performed with rapidly tunable external cavity quantum cascade lasers (EC-QCLs). Fast wavelength tuning in the external cavity is realized by a microoptoelectromechanical systems (MOEMS) grating oscillating at a resonance frequency of about 1 kHz with a deflection amplitude of up to 10 deg. The entire spectral range of the broadband QCL can therefore be covered in just 500 mu s, paving the way for real-time spectroscopy in the mid-IR region. In addition to its use in spectroscopic measurements conducted in backscattering and transmission geometry, the MOEMS-based laser source is characterized regarding pulse intensity noise, wavelength reproducibility, and spectral resolution. (c) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License.

引用

页数：10

共 27 条

[1] Ultra-broadband quantum cascade laser, tunable over 760 cm-1, with balanced gain [J].

Bandyopadhyay, N. ;

Chen, M. ;

Sengupta, S. ;

Slivken, S. ;

Razeghi, M. .

OPTICS EXPRESS, 2015, 23 (16) :21159-21164

[2] High performance liquid chromatography with mid-infrared detection based on a broadly tunable quantum cascade laser [J].

Beskers, Timo F. ;

Brandstetter, Markus ;

Kuligowski, Julia ;

Quintas, Guillermo ;

Wilhelm, Manfred ;

Lendl, Bernhard .

ANALYST, 2014, 139 (09) :2057-2064

[3] Real-time Spectroscopy Enabled by External Cavity QCLs with MOEMS Diffraction Gratings [J].

Butschek, L. ;

Hugger, S. ;

Jarvis, J. ;

Haertelt, M. ;

Merten, A. ;

Grahmann, J. ;

Boskovic, D. ;

Fuchs, F. ;

Ostendorf, R. ;

Schilling, C. ;

Rattunde, M. ;

Wagner, J. .

QUANTUM SENSING AND NANO ELECTRONICS AND PHOTONICS XIV, 2017, 10111

[4]

Chu P. M., NIST CHEMISTRY WEBBO, V69

[5] MEMS-Mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies [J].

Grahmann, Jan ;

Dreyhaupt, Andre ;

Drabe, Christian ;

Schroedter, Richard ;

Kamenz, Joerg ;

Sandner, Thilo .

MOEMS AND MINIATURIZED SYSTEMS XV, 2016, 9760

[6] Tunable External Cavity Quantum Cascade Lasers (EC-QCL): an Application Field for MOEMS Based Scanning Gratings [J].

Grahmann, Jan ;

Merten, Andre ;

Ostendorf, Ralf ;

Fontenot, Michael ;

Bleh, Daniela ;

Schenk, Harald ;

Wagner, Hans-joachim .

MOEMS AND MINIATURIZED SYSTEMS XIII, 2014, 8977

[7] Broadband-tunable external-cavity quantum cascade lasers for the spectroscopic detection of hazardous substances [J].

Hugger, S. ;

Fuchs, F. ;

Jarvis, J. ;

Kinzer, M. ;

Yang, Q. K. ;

Driad, R. ;

Aidam, R. ;

Wagner, J. .

QUANTUM SENSING AND NANOPHOTONIC DEVICES X, 2013, 8631

[8] External cavity quantum cascade laser [J].

Hugi, Andreas ;

Maulini, Richard ;

Faist, Jerome .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2010, 25 (08)

[9] External cavity quantum cascade laser tunable from 7.6 to 11.4 μm [J].

Hugi, Andreas ;

Terazzi, Romain ;

Bonetti, Yargo ;

Wittmann, Andreas ;

Fischer, Milan ;

Beck, Mattias ;

Faist, Jerome ;

Gini, Emilio .

APPLIED PHYSICS LETTERS, 2009, 95 (06)

[10]

Jarvis J, 2017, ADV OPT TECHNOL, V6, P85, DOI 10.1515/aot-2016-0068

← 1 2 3 →