共 9 条
[1]
Re-configurable fluid circuits by PDMS elastomer micromachining
[J].
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,
1999,
:222-227
[2]
Design and microfabrication of a hybrid piezoelectric-capacitive tactile sensor
[J].
Sens Rev,
2006, 3 (186-192)
:186-192
[3]
Hwang Eun-Soo, 2007, IEEE C MEMS, P714
[4]
Kim Baek-chul, 2011, SPIE, P7679
[5]
King CH, 2009, IEEE T HAPTICS, V2, P103, DOI [10.1109/TOH.2009.4, 10.1109/ToH.2009.4]
[7]
Mascaro Stephen A., 2004, IEEE INT C ROB AUT I, V20