Antenna-coupled microbolometers on a silicon-nitride membrane

被引：10
作者：
González, FJ
Ilic, B
Boreman, GD
机构：
[1] Univ Autonoma San Luis Potosi, Inst Invest Comunicac Opt, San Luis Potosi, Mexico
[2] Cornell Univ, CNF, Ithaca, NY USA
[3] UCF, Coll Opt & Photon, Orlando, FL USA
来源：
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS | 2005年 / 47卷 / 06期
关键词：
antenna-coupled detectors; microbolometers; silicon nitride membrane; responsivity; thermal impedance;
D O I：
10.1002/mop.21226
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Square-spiral antenna-coupled microbolometers made of gold and chrome are fabricated on a silicon-nitride membrane. The membrane gives mechanical stability and thermal isolation to the detectors so that they can be used as picture elements in commercial infrared-imaging systems. The fabricated devices are measured under room pressure and tinder vacuum, giving D* values of 3 X 10(6) cm root Hz/W and 1.7 X 10(7) cm root Hz/W, respectively. By using vanadium-oxide, values well above 1 X 10(8) cm root Hz/W for D* can be obtained. Variations to the fabrication process that will allow the use of vanadium oxide are suggested. (c) 2005 Wiley Periodicals, Inc.
引用
收藏
页码：546 / 548
页数：3
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