High-speed scanning of piezo-probes for nano-fabrication

被引：15
作者：
Croft, D [1 ]
McAllister, D [1 ]
Devasia, S [1 ]
机构：
[1] Univ Utah, Dept Mech Engn, Salt Lake City, UT 84112 USA
来源：
JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME | 1998年 / 120卷 / 03期
关键词：
D O I：
10.1115/1.2830166
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Low scanning speed of piezo-probes has been a fundamental limitation of scanning probe based nano-fabrication techniques. Typical scan-rates achieved are limited, by structural vibrations of the piezo-probe, to about 1/10th the fundamental vibrational frequency of the piezo-probe. Faster scanning of piezo-probes is achieved here (experimental results are presented) by using inversion of the piezo-dynamics-this approach uses a feedforward input voltage, applied to piezo-probe, to compensate for piezo vibrations.
引用
收藏
页码：617 / 622
页数：6
相关论文
共 31 条
  • [1] MICROFABRICATION OF INTEGRATED SCANNING TUNNELING MICROSCOPE
    ALBRECHT, TR
    AKAMINE, S
    ZDEBLICK, MJ
    QUATE, CF
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (01): : 317 - 318
  • [2] OPTICAL SCAN-CORRECTION SYSTEM APPLIED TO ATOMIC FORCE MICROSCOPY
    BARRETT, RC
    QUATE, CF
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1991, 62 (06) : 1393 - 1399
  • [3] DESIGN CONSIDERATION IN AN ULTRAFAST SCANNING TUNNELING MICROSCOPE
    BOTKIN, D
    WEISS, S
    OGLETREE, DF
    BEEMAN, J
    SALMERON, M
    CHEMLA, DS
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (08) : 4130 - 4134
  • [4] Nonlinear inversion-based output tracking
    Devasia, S
    Chen, DG
    Paden, B
    [J]. IEEE TRANSACTIONS ON AUTOMATIC CONTROL, 1996, 41 (07) : 930 - 942
  • [5] INVERSE DYNAMICS OF ARTICULATED FLEXIBLE STRUCTURES - SIMULTANEOUS TRAJECTORY TRACKING AND VIBRATION REDUCTION
    DEVASIA, S
    BAYO, E
    [J]. DYNAMICS AND CONTROL, 1994, 4 (03) : 299 - 309
  • [6] DEVASIA S, 1996, IN PRESS INT J CONTR
  • [7] INTERNAL MODEL PRINCIPLE OF CONTROL-THEORY
    FRANCIS, BA
    WONHAM, WM
    [J]. AUTOMATICA, 1976, 12 (05) : 457 - 465
  • [8] Friedland B., 1986, CONTROL SYSTEM DESIG
  • [9] Tracking control of a piezoceramic actuator
    Ge, P
    Jouaneh, M
    [J]. IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY, 1996, 4 (03) : 209 - 216
  • [10] A SCANNING TUNNELING MICROSCOPE WITH A CAPACITANCE-BASED POSITION MONITOR
    GRIFFITH, JE
    MILLER, GL
    GREEN, CA
    GRIGG, DA
    RUSSELL, PE
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 2023 - 2027
1234