Fabrication of Nanopore on Electron Beam Induced Membrane for Single Molecule Analysis

被引：3

作者：

Choi, S. S. ^{[1
]}

Park, M. G. ^{[2
]}

Yamaguchi, T. ^{[1
]}

Han, C. H. ^{[1
]}

Oh, S. J. ^{[1
]}

Park, K. J. ^{[2
]}

Yoo, J. H. ^{[2
]}

Kim, Y. S. ^{[3
]}

Park, N. K. ^{[4
]}

机构：

[1] SunMoon Univ, Res Ctr Nanobio Sci, Asan 31460, South Korea

[2] Natl Nanofabricat Ctr, Dept Nanoanal, Daejeon 34141, South Korea

[3] Sungkyunkwan Univ, Sch Elect & Elect Engn, Suwon 16419, South Korea

[4] Seoul Natl Univ, Sch Elect Engn, Seoul 08826, South Korea

来源：

CHEMICAL SENSORS 12: CHEMICAL AND BIOLOGICAL SENSORS AND ANALYTICAL SYSTEMS | 2016年 / 75卷 / 16期

基金：

新加坡国家研究基金会;

关键词：

SOLID-STATE NANOPORES; MICROSCOPE; IRRADIATION; PROBE; HOLES; GOLD; ION;

D O I：

10.1149/07516.0281ecst

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We report fabrication of Au nanopore formation on pyramid by using focused ion beam technique and electron beam irradiation techniques. Under electron beam irradiations on the specimen, carbon incorporation with electron beam is reported. We initially observed the no Au nanoparticles on the diffused membrane by using transmission electron microscopy (TEM). After the samples were kept under the room environments for several months, Au particles were formed on the diffused membrane via Ostwald ripening. We also observed the bi-stable phase of Au crystalline structure on the diffused membrane during TEM imaging process via Spinodal decomposition. Fabricated nanopore integrated with Au particles can be utilized as optical nanopore for ultrafast genome sequencing.

引用

页码：281 / 287

页数：7

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