Structure and mechanical properties of PACVD fluorinated amorphous carbon films

被引：48
作者：
Bottani, CE
Lamperti, A
Nobili, L
Ossi, PM
机构：
[1] Politecn Milan, INFM, I-20133 Milan, Italy
[2] Politecn Milan, Dipartimento Ingn Nucl, I-20133 Milan, Italy
[3] Politecn Milan, Dipartimento Chim Mat & Ingn Chim G Natta, I-20131 Milan, Italy
来源：
THIN SOLID FILMS | 2003年 / 433卷 / 1-2期
关键词：
fluorinated amorphous carbon; plasma assisted chemical vapour deposition; Raman spectroscopy; mechanical properties;
D O I：
10.1016/S0040-6090(03)00323-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Fluorinated amorphous carbon films were deposited by plasma assisted chemical vapour deposition from C2H2 and CF4 gases. Gas mixture and bias voltage were changed. We analysed film structure by Raman and infrared spectroscopies and film hardness by micro-indentation. Raman spectra show a transition from diamond-like carbon films to polymer-like films as the CF4 content in the plasma increases. The presence of a strong fluorescence background in the spectra of fluorine rich films indicates a polymer-like structure. Infrared spectra confirm the presence of -CFx, F2C=CF2 and F2C=C(HF) groups in the films. Hardness values are correlated with the trends of the D to G peak intensity ratio, I-D/I-G. Mechanisms involved in film growth and formation are discussed especially regarding fluorine substitution for hydrogen. (C) 2003 Elsevier Science B.V. All rights reserved.
引用
收藏
页码：149 / 154
页数：6
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