Elastic Modulus Determination of Al-Cu Film Alloys Prepared by Thermal Diffusion

被引:12
作者
Huerta, E. [1 ,2 ]
Oliva, A. I. [1 ]
Aviles, F. [3 ]
Gonzalez-Hernandez, J. [2 ]
Corona, J. E. [1 ]
机构
[1] Ctr Invest & Estudios Avanzados, IPN Unidad Merida, Dept Fis Aplicada, Merida 97310, YUC, Mexico
[2] Ctr Invest Mat Avanzados, SC, CHIH, Chihuahua 31109, Mexico
[3] Ctr Invest Cientif Yucatan AC, Unidad Mat, Merida 97200, YUC, Mexico
关键词
INDUCED STRESSES; THIN-FILMS; COPPER;
D O I
10.1155/2012/895131
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Elastic moduli of 50-250nm thick Al-50 at % Cu film alloys deposited by thermal evaporation on Kapton substrates and postformed by thermal diffusion are investigated. Formation of the Al2Cu alloy phase was confirmed by X-ray photoelectron spectroscopy (XPS). Surface morphology was examined by atomic force microscopy (AFM) and scanning electron microscopy (SEM) before and after tensile mechanical testing. Force-strain curves of the Al-Cu alloy were obtained by subtracting the effect of the force-strain Kapton curves from the corresponding curves of the Al-Cu/Kapton system. A reduction in the elastic modulus of the Al-Cu alloys from 106.1 to 77.8 GPa with the increase of alloy thickness was obtained. Measured elastic moduli were between the reported bulk modulus for Al and Cu. Reductions in the surface roughness and increments in the grain size were measured after tensile testing of the Al-Cu alloys.
引用
收藏
页数:8
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