Phase and structural characterization of Sr2Nb2O7 and SrNbO3 thin films grown via pulsed laser ablation in O2 or N2 atmospheres

被引:16
作者
Balasubramaniam, K. R. [1 ]
Cao, Y. [1 ]
Patel, N. [1 ]
Havelia, S. [1 ]
Cox, P. J. [1 ]
Devlin, E. C. [1 ]
Yu, E. P. [1 ]
Close, B. J. [1 ]
Woodward, P. M. [2 ]
Salvador, P. A. [1 ]
机构
[1] Carnegie Mellon Univ, Dept Mat Sci & Engn, Pittsburgh, PA 15213 USA
[2] Ohio State Univ, Dept Chem, Columbus, OH 43210 USA
关键词
niobates; layered perovskites; laser deposition; epitaxy;
D O I
10.1016/j.jssc.2008.01.007
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
The influence of substrate temperature, process gas, deposition pressure, and substrate type on the phase selection, orientation/epitaxy, and growth morphology of thin films in the SrNbOy (y approximate to 3.0 or 3.5) family was investigated. Pulsed laser deposited films (from a Sr2Nb2O7 target) obtained in both oxygen and nitrogen atmospheres upon various substrates were characterized with X-ray diffraction, energy dispersive spectroscopy, atomic force microscopy, and transmission electron microscopy. In oxygen atmospheres, films adopted the (110)-layered perovskite structure of the target. Higher temperatures, lower pressures of oxygen, and use of (110)-oriented SrTiO3 substrates lead to highly crystalline, epitaxial films of Sr2Nb2O7. The use of nitrogen atmospheres resulted in cubic perovskite SrNbO3 formation: epitaxial, textured, or polycrystalline films were obtained depending on the substrate; no nitrogen incorporation could be observed on the anion sublattice. On SrTiO3, the cubic perovskite films followed a cube-on-cube epitaxy and planar defects were observed to occur on the (110) perovskite planes. (C) 2008 Elsevier Inc. All rights reserved.
引用
收藏
页码:705 / 714
页数:10
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