Development of a grazing incidence soft X-ray microscope with a laser-produced plasma source

被引：9

作者：

Ogata, T ^{[1
]}

Iimura, K ^{[1
]}

Aoki, S ^{[1
]}

Yoshidomi, Y ^{[1
]}

Mitomi, O ^{[1
]}

Shinada, K ^{[1
]}

机构：

[1] NIKON INC,TOKYO 140,JAPAN

来源：

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 1996年 / 80卷

关键词：

D O I：

10.1016/0368-2048(96)02991-X

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

A soft X-ray microscope was constructed using grazing incidence mirrors and a laser-produced plasma source. A Q-switched Nd-YAG laser (1.064 mu m, 530mJ, 6ns pulse) and a Wolter type-I mirror objective were used. The spatial resolution estimated by the edge profile (25% - 75%) was about 60nm using 5 - 7nm soft Xrays from an Al target. Hydrated biological specimens, such as human blood cells, could be observed using an environmental chamber with Si3N4 windows (thickness: 0.1 mu m), a back-illuminated CCD camera, and 3-5nm soft X-rays from a Ta target.

引用

页码：357 / 360

页数：4

共 7 条

[1] SUB-100 NM-RESOLUTION GRAZING-INCIDENCE SOFT-X-RAY MICROSCOPE WITH A LASER-PRODUCED PLASMA SOURCE [J].