Fabrication and characterization of multi-scale microlens arrays with anti-reflection and diffusion properties

被引：15

作者：

Chen, Yung-Pin ^{[1
]}

Lee, Chih-Hsien

Awang, Lon

机构：

[1] Natl Taiwan Univ, Dept Elect Engn, Photon & Nanostruct Lab, Taipei 10617, Taiwan

来源：

NANOTECHNOLOGY | 2011年 / 22卷 / 21期

关键词：

D O I：

10.1088/0957-4484/22/21/215303

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In this paper, an effective method for fabricating artificial compound-eye structures is demonstrated. The fabrication of high fill factor microlens arrays (MLAs) with sub-wavelength structures (SWSs) on a polycarbonate (PC) substrate involves nanoimprint and thermo-extrusion techniques by using two different scales of nano/micromolds. In addition, the MLAs with SWSs on the PC substrate would be replicated on a polymethylmethacrylate (PMMA) millimeter concave surface by hot-embossing, forming three-level compound-eye structures. The optical properties of these samples are characterized. The transmittances of two-level PC and three-level PMMA compound structures are increased by 2.5% and 2%, and the uniformities are enhanced by 18% and 24%, respectively.

引用

页数：8

共 12 条

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