Investigation of microlens mold fabricated by focused ion beam technology

被引：21

作者：

Fu, Y ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Precis Engn & Nanotechnol Ctr, Singapore 639798, Singapore

来源：

MICROELECTRONIC ENGINEERING | 2001年 / 56卷 / 3-4期

关键词：

microlens mold; FIB milling; hot embossing; replication;

D O I：

10.1016/S0167-9317(01)00570-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel fabrication method of microlens mold, focused ion beam (FIB) milling, is presented in this paper. Substrates with different materials, copper, nickel, and bulk silicon, were used in order to compare their milling quality. Two-dimensional profiles and surface roughness of the fabricated molds were measured using a laser interferometer. Finally, the mold was used for hot embossing replication. The surface roughness (R-a value) of the replica is about 8 nm, and the profile is neat and symmetric. Measured sizes of the replica coincide well with that of the design. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：333 / 338

页数：6

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