Printed carbon nanotube thin film transistors based on perhydropolysilazane-derived dielectrics for low power flexible electronics

被引:25
作者
Li, Xiaoqian [1 ,3 ]
Wang, Xin [1 ]
Deng, Jie [1 ,2 ]
Li, Min [1 ]
Shao, Shuangshuang [1 ,2 ]
Zhao, Jianwen [1 ,2 ]
机构
[1] Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Div Nanodevices & Related Nanomat, 398 Ruoshui Rd, Suzhou 215123, Jiangsu, Peoples R China
[2] Univ Sci & Technol China, Sch Nanotech & Nanobion, 398 Ruoshui Rd,Suzhou Ind Pk, Suzhou 215123, Jiangsu, Peoples R China
[3] Shandong Univ, Shandong Technol Ctr Nanodevices & Integrat, Sch Microelect, Jinan 250100, Shandong, Peoples R China
关键词
Flexible printed electronics; Carbon nanotube; Thin film transistor; Electric double layer (EDL); PHPS-Derived dielectrics; Low power inverters; DOUBLE-LAYER TRANSISTORS; ROOM-TEMPERATURE; GATE INSULATOR; CMOS INVERTERS; OXIDE; PERFORMANCE; ELECTROLYTE; DEPOSITION; GRAVURE; ARRAYS;
D O I
10.1016/j.carbon.2022.01.058
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Electric double layer (EDL) electrolyte dielectrics have attracted great interest for low voltage and low power consumption portable thin film transistor (TFT) devices and circuits due to their high gate modulation efficiency. In this work, fully printed single-walled carbon nanotube (SWCNT) TFTs are fabricated using proton conducting inorganic perhydropolysilazane (PHPS) derivatives as the EDL dielectrics at low frequencies (<1 kHz) that can be processed in humidity even at quite low temperature (<100 degrees C) and relatively short reaction time (similar to 10 min). Fabricated fully printed SWCNT TFTs exhibit excellent electrical properties with low operating voltage (+/- 1 V), high on/off ratio (similar to 10(6)), small sub-threshold swing (70-110 mV/dec), good stability and the average carrier mobility of 6.3 cm(2) V-1 s(-1). In addition, the precise control of the SWCNT TFTs' threshold voltage and polarity (from depleted p-type to enhanced p and n-type, and well-balanced ambipolar) is successful demonstrated by adjusting the printable sc-SWCNT ink concentrations and electron doping technology (using ethanolamine as the electron doping agent). Furthermore, fully printed flexible complementary metal oxide semiconductor (CMOS) and CMOS-like inverters based on as-prepared SWCNT TFTs represent extremely low static power consumption (0.1 pW/mu m and 0.05 pW/mu m, respectively), high voltage gain (up to 45 at V-DD = 0.7 V) and relatively large noise margins. (C) 2022 Elsevier Ltd. All rights reserved.
引用
收藏
页码:267 / 276
页数:10
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