Effect of substrate temperature on structural and optical properties of reactive dc magnetron sputtered CdZnO thin films

被引：0

作者：

Kumar, A. GuruSampath ^{[1
]}

Sarmash, T. Sofi ^{[1
]}

Obulapathi, L. ^{[2
]}

Rani, D. Jhansi ^{[1
]}

Rao, T. Subba ^{[1
]}

Asokan, K. ^{[3
]}

机构：

[1] Sri Krishnadevaraya Univ, Dept Phys, Anantapuramu 515003, AP, India

[2] Annamacharaya Inst Tech & Sci, Dept Phys, Rajampet 516126, AP, India

[3] Interuniv Accelerator Ctr, Aruna Asaf Ali Marg, New Delhi 110067, India

来源：

MATERIALS TODAY-PROCEEDINGS | 2016年 / 3卷 / 06期

关键词：

GAXRD; CdZnO thin films; optical band gap; substrate temperature; ELECTRICAL-PROPERTIES; ZNO FILMS; DEPOSITION;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of ternary cadmium zinc oxide (CdZnO) were prepared on glass substrates by dc magnetron sputtering technique at different substrate temperatures (RT, 100 degrees C, 200 degrees C & 300 degrees C). The structural and optical properties of the films are investigated by glancing angle x-ray diffraction (GAXRD) and UV-vis-NIR spectroscopy measurements respectively. GAXRD pattern confirmed the hexagonal wurtzite structure with a preferred grain orientation in (002) direction for all the samples. The optical studies reveal that, the optical band gap was decreased from 3.25eV to 2.88eV with increase of substrate temperature. (C) 2015Elsevier Ltd. All rights reserved.

引用

页码：1604 / 1608

页数：5

共 23 条

[1] Room-temperature rf magnetron sputtered ZnO for electromechanical devices [J].

Barker, A ;

Crowther, S ;

Rees, D .

SENSORS AND ACTUATORS A-PHYSICAL, 1997, 58 (03) :229-235

[2] Deposition and electrical properties of N-In codoped p-type ZnO films by ultrasonic spray pyrolysis [J].

Bian, JM ;

Li, XM ;

Gao, XD ;

Yu, WD ;

Chen, LD .

APPLIED PHYSICS LETTERS, 2004, 84 (04) :541-543

[3]

Cullity B. D., 2009, ELEMENTS XRAY DIFFRA

[4] Structural, optical and electrical properties of In doped CdO thin films for optoelectronic applications [J].

Gupta, R. K. ;

Ghosh, K. ;

Patel, R. ;

Mishra, S. R. ;

Kahol, P. K. .

MATERIALS LETTERS, 2008, 62 (19) :3373-3375

[5] A new route for fabricating CdO/c-Si heterojunction solar cells [J].

Ismail, Raid A. ;

Abdulrazaq, Omar A. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2007, 91 (10) :903-907

[6] Transparent conducting Zr-doped In2O3 thin films for organic light-emitting diodes [J].

Kim, H ;

Horwitz, JS ;

Kushto, GP ;

Qadri, SB ;

Kafafi, ZH ;

Chrisey, DB .

APPLIED PHYSICS LETTERS, 2001, 78 (08) :1050-1052

[7] Structural, Electrical and Optical Properties of Cd Doped ZnO Thin Films by Reactive dc Magnetron Sputtering [J].

Kumar, A. Guru Sampath ;

Obulapathi, L. ;

Sarmash, T. Sofi ;

Rani, D. Jhansi ;

Maddaiah, M. ;

Rao, T. Subba ;

Asokan, K. .

JOM, 2015, 67 (04) :834-839

[8] Transparent conducting ZnO:Al, In and Sn thin films deposited by the sol-gel method [J].

Lee, JH ;

Park, BO .

THIN SOLID FILMS, 2003, 426 (1-2) :94-99

[9] Preparation and electrical properties of Ga-doped ZnO nanoparticles by a polymer pyrolysis method [J].

Li, Yuan-Qing ;

Yong, Kang ;

Xiao, Hong-Mei ;

Ma, Wang-Jing ;

Zhang, Guang-Lei ;

Fu, Shao-Yun .

MATERIALS LETTERS, 2010, 64 (15) :1735-1737

[10] As-doped p-type ZnO produced by an evaporation/sputtering process [J].

Look, DC ;

Renlund, GM ;

Burgener, RH ;

Sizelove, JR .

APPLIED PHYSICS LETTERS, 2004, 85 (22) :5269-5271

← 1 2 3 →