Membrane-integrated superconducting nanowire single-photon detectors

被引：0

作者：

Najafi, F. ^{[1
]}

Mower, J. ^{[1
]}

Hu, X. ^{[1
]}

Bellei, F. ^{[1
]}

Kharel, P. ^{[1
]}

Dane, A. ^{[1
]}

Ivry, Y. ^{[1
]}

Cheong, L. ^{[1
]}

Sunter, K. ^{[1
]}

Englund, D. ^{[1
]}

Berggren, K. K. ^{[1
]}

机构：

[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

来源：

2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2013年

关键词：

EFFICIENCY;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.

引用

页数：2

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