Ion and neutral scattering spectra in LEIS

被引：3
作者：
Draxler, M
Zeppenfeld, P
Beikler, R
Taglauer, E
Bauer, P [1 ]
机构：
[1] Univ Linz, Inst Expt Phys, A-4040 Linz, Austria
[2] Max Planck Inst Plasma Phys, EURATOM Assoc, D-85748 Garching, Germany
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2005年 / 232卷
关键词：
low energy ion scattering; TOF-LEIS; ions; single scattering; multiple scattering; experiment; computer simulation;
D O I：
10.1016/j.nimb.2005.03.056
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Low energy ions scattering (LEIS) set-ups equipped with a time-of-flight (TOF) detection system can achieve an experimental resolution < 1 % for He ions at an energy of about 1 keV, corresponding to sub-monolayer depth resolution. Furthermore, spectra of scattered neutrals reveal interesting information on the electronic interaction of the projectiles with the sample. We compare experimental TOF-LEIS spectra to Monte-Carlo simulations (MARLOWE) and discuss what one can learn from this comparison about elastic scattering (single scattering versus multiple scattering), about inelastic scattering (local versus non-local electronic energy loss) and about typical trajectories (validity of single scattering model, information depth). Our present understanding of ion and neutral scattering spectra in LEIS is discussed along these lines and results are presented for scattering of He+ ions from polycrystalline Au. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：266 / 271
页数：6
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