Pressure sensing of Fabry-Perot interferometer with a microchannel demodulated by a FBG

A novel and compact fiber-probe pressure sensor was demonstrated based on micro Fabry-Perot interferometer (FPI). The device was fabricated by splicing both ends of a short section simplified hollow-core photonic crystal fiber (SHC-PCF) with single mode fibers (SMFs), and then a micro channel was drilled by femtosecond laser micromachining in the SHC-PCF to significantly enhance the pressure sensitivity. The pressure sensing characteristics based on micro-FPI have been investigated by measuring the signals through the demodulation of phase since the external signal imposing on the interferometer will induce the phase change of interference signal. Then a FBG was cascaded to demodulate the signal. A micro FPI demonstrates a maximum pressure sensitivity of 32 dB/MPa, while a low temperature cross-sensitivity of 0.27 KPa/degrees C. Hence it may have potential for pressure applications in harsh environment.