Design of metal interconnects for stretchable electronic circuits

被引:340
作者
Gonzalez, Mario [1 ]
Axisa, Fabrice [2 ]
BuIcke, Mathieu Vanden [1 ]
Brosteaux, Dominique [3 ]
Vandevelde, Bart [1 ]
Vanfleteren, Jan [2 ,3 ]
机构
[1] IMEC, IPSI REMO, B-3001 Louvain, Belgium
[2] IMEC, TFCG Microsyst, Ghent, Belgium
[3] Univ Ghent, ELIS TFCG Microsyst, B-9000 Ghent, Belgium
关键词
D O I
10.1016/j.microrel.2008.03.025
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The trend of microelectronic products in the textile or medical field is toward higher functionality, miniaturization, application of new materials and a necessity for deformable electronic circuits for improving the comfort control. In this work, the design of flexible and stretchable interconnections is presented. These interconnections are done by embedding sinuous electroplated metallic wires in a stretchable substrate material. A silicone material was chosen as substrate because of its low stiffness and high elongation before break. Common metal conductors used in the electronic industry have very limited elastic ranges; therefore a metallization design is crucial to allow stretchability of the conductors going up to 100%. Different configurations were simulated and compared among them and based on these results, a horseshoe like shape was suggested. This design allows a large deformation with the minimum stress concentration. Moreover, the damage in the metal is significantly reduced by applying narrow metallization schemes. In this way, each conductor track has been split in four parallel lines of 15 pm and 15 pm space in order to improve the mechanical performance without limiting the electrical characteristics. (c) 2008 Elsevier Ltd. All rights reserved.
引用
收藏
页码:825 / 832
页数:8
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