Optical and electrical tunability in vertically aligned MoS2 thin films prepared by DC sputtering: Role of film thickness

被引:20
作者
Tiwari, Pranjala [1 ]
Jaiswal, Jyoti [1 ,2 ]
Chandra, Ramesh [1 ]
机构
[1] Indian Inst Technol Roorkee, Inst Instrumentat Ctr, Nanosci & Thin Film Lab, Roorkee 247667, India
[2] Rajiv Gandhi Univ, Ctr Adv Res, Dept Phys, Papum Pare 791112, Arunachal Prade, India
关键词
Thin films; Sputtering; Ellipsometry; Optical properties; Electrical resistance; Vertically aligned Mos(2); SPECTROSCOPIC ELLIPSOMETRY; GROWTH; CONSTANTS; ROUGHNESS; ENERGY; SITES;
D O I
10.1016/j.vacuum.2022.110903
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Insights into the fundamentals of structure-property relations are one of the most important key parameters, which can be utilized for tailoring material properties such as electrical, and optical for the photonics, optoelectronics, energy storage, and sensing devices. Herein, we report a controlled single-step, large area growth of highly crystalline vertically grown edge exposed MoS2 thin films using DC magnetron sputtering. To understand a correlation between microstructural and material properties, we have prepared MoS2 films of different thicknesses (similar to 1 nm-440 nm) by varying sputtering deposition times (DT = 1 s-10 min). We have attempted to augment our prevailing understanding of structure-property relations of MoS2 in order to provide large tunability in the optical and electrical properties. Spectroscopic ellipsometry results suggest that the complex refractive index (n and k), dielectric function (epsilon(1) and epsilon(2)), and optical bandgap (E-g = 1.35-1.88 eV) are highly dependent on MoS2 film thickness. The MoS2 electrical resistance was observed in the range of similar to 15 k Omega-98 M Omega, displaying an inverse relationship with the film thickness.
引用
收藏
页数:14
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