Some new applications of the scanning electron acoustic microscope for materials evaluation

被引：16

作者：

Jiang, FM ^{[1
]}

Kojima, S

Zhang, BY

Yin, QR

机构：

[1] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan

[2] Chinese Acad Sci, Shanghai Inst Ceram, Shanghai 200050, Peoples R China

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1998年 / 37卷 / 5B期

关键词：

residual stress; ferroelectric; domains; dislocation; scanning electron acoustic microscope;

D O I：

10.1143/JJAP.37.3128

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Several different kinds or materials were investigated by an improved scanning electron acoustic microscope (SEAM). Residual stress distribution in aluminum metal and whisker-reinforced Al2O3-SiCw ceramic induced by Vicker's indentation, domain structures in a ferroelectric Bi4Ti3O12 single crystal, dislocations and defects in the hetero-structure GaAs/GaAlAs epitaxial multilayer were successfully observed. Alternative contrast mechanisms were discussed. The advantages of the scanning electron acoustic microscope for materials evaluation were demonstrated.

引用

页码：3128 / 3131

页数：4

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