Specific features of the structure and properties of arc-PVD coatings depending on the spatial arrangement of the sample in the chamber

被引：47

作者：

Grigoriev, Sergey ^{[1
]}

Vereschaka, Alexey ^{[2
]}

Zelenkov, Vsevolod ^{[2
]}

Sitnikov, Nikolay ^{[3
]}

Bublikov, Jury ^{[2
]}

Milovich, Filipp ^{[4
]}

Andreev, Nikolay ^{[4
]}

Mustafaev, Enver ^{[1
]}

机构：

[1] Moscow State Technol Univ STANKIN, Vadkovsky Per 1, Moscow 127994, Russia

[2] IDTI RAS, Vadkovsky Per 18-1a, Moscow 127994, Russia

[3] State Sci Ctr, Keldysh Res Ctr, Onezhskaya St 8, Moscow 125438, Russia

[4] Natl Univ Sci & Technol MISiS, Leninsky Prospect 4, Moscow 119049, Russia

来源：

VACUUM | 2022年 / 200卷

基金：

俄罗斯科学基金会;

关键词：

Vacuum-plasma technologies; Controlled accelerated arc-PVD; Coatings; Microparticles; Microhardness; AL-SI-N; CUTTING TOOLS; CATHODE SPOTS; THIN-FILMS; VACUUM; DEPOSITION; PLASMA; TIN; MACROPARTICLES; EROSION;

D O I：

10.1016/j.vacuum.2022.111047

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The paper considers the influence of the spatial arrangement of samples in the unit chamber on parameters of deposited coatings when using a vacuum arc evaporator with controlled accelerated motion of a cathode spot of Arc-PVD (CAA-PVD) compared to a standard used in NNW6.6 evaporator with magnetic cathode spot retention by axial field. The distance from a sample to the cathode surface and an offset of the sample about the central axis of the cathode were varied. The study reveals the regular patterns' influence on the spatial sample arrangement on coating properties, such as thickness, microhardness, surface macroparticle content density, and crystal structure. Using the CAA-PVD technology allows reducing the distance from the cathode surface to the samples from 230 to 150 mm, forming a coating with a higher microhardness and lower density of microparticles than the standard used in NNW6.6 evaporator. It is found that a CAA-PVD evaporator forms a coating with a higher hardness and lower density of microparticles compared to a NNW6.6 evaporator. The application of the CAAPVD technology significantly (by 30-270%) reduces the density of microparticles on the coating surface, and the coating is characterized by a more uniform thickness and distribution of microparticle density.

引用

页数：15