The ZrO/W(100) Schottky cathode: Morphological modification and its effect on long term operation

被引:11
作者
Bahm, Alan [1 ]
Schwind, Greg [1 ]
Swanson, Lyn [1 ]
机构
[1] FEI Co, Hillsboro, OR 97124 USA
关键词
ELECTRON SOURCE; FIELD; STABILITY;
D O I
10.1063/1.3632064
中图分类号
O59 [应用物理学];
学科分类号
摘要
An investigation of the change in various geometric and emission parameters over the life cycle of nine ZrO/W(100) Schottky cathodes was performed. The initial shape for all emitters was "Stage 1," i.e., a large square, low work function (100) facet intersected by four (112) and (110) facets. The ending shape for all emitters was "Stage 0," i.e., a round central (100) facet with four side (110) planes. Change in geometric parameters such as emitter apex radius r, cone angle alpha, central (100) facet size f, and neck size L were measured at the beginning and after 10 000 to 18 000 h of cathode operation. For a particular end form (or Stage), f scaled linearly with emitter radius r. In addition, emission parameters such as the axial angular current density I', total current I(t), work function phi, electric field F, and extraction voltage V(e) were monitored continuously. Of the nine sources investigated four experienced collapsing net planes (ring collapse) on the central (100) crystal facet. The emitters with ring collapse events had the largest increase in r and a corresponding reduction in the field factor beta = F/V(e). For the most part beta, phi, and r remained unchanged for those emitters not having ring collapse events. The ending I' values mostly decreased at a constant V(e), but less so for those emitters with no ring collapse. Experimental results showed that for I' <= 0.3 mA/sr and T = 1800 K ring collapse occurs. In contrast, for I' >= 0.3 mA/sr ring collapse does not occur. For all emitters investigated, the parameters exhibiting the largest increase over the course of the life test were L and I(t), whereas a was typically unchanged. (C) 2011 American Institute of Physics. [doi:10.1063/1.3632064]
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页数:13
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