Patterned growth and transfer of ZnO micro- and nanocrystals with size and location control

被引：30

作者：

Cole, Jesse J. ^{[1
]}

Wang, Xinyu ^{[1
]}

Knuesel, Robert J. ^{[1
]}

Jacobs, Heiko O. ^{[1
]}

机构：

[1] Univ Minnesota, Minneapolis, MN 55455 USA

来源：

ADVANCED MATERIALS | 2008年 / 20卷 / 08期

关键词：

D O I：

10.1002/adma.200703102

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A method to fabricate and transfer crystalline ZnO with control over location, orientation, size, and shape is reported. The process uses an oxygen plasma treatment in combination with a photoresist pattern on magnesium-doped GaN substrates to define narrow nucleation regions and attachment points with 100 nanometer scale dimensions. Lateral epitaxial overgrowth follows nucleation to produce single-crystalline ZnO shown in the figure.

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页码：1474 / +

页数：6

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