Wafer-level in-registry microstamping

被引：24

作者：

Folch, A ^{[1
]}

Schmidt, MA ^{[1
]}

机构：

[1] MIT, Microsyst Technol Lab, Cambridge, MA 02139 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1999年 / 8卷 / 01期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1109/84.749407

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microstamping is an inexpensive technique that allows for micrometer-scale patterning of a rich variety of materials by a replication procedure based on an elastomeric stamp, We have investigated the scalability of microstamping for its use in the fabrication of microelectromechanical systems. Until now, the application of microstamping to multilayer processing at a wafer level has been impaired by the flexibility of the stamp, By mounting the stamp onto a rigid glass surface, we demonstrate the feasibility of in-registry multilayer microstamping at a 4-in wafer level. [287].

引用

收藏

页码：85 / 89

页数：5

相关论文

共 18 条

[1] SELF-ORGANIZATION OF ORGANIC LIQUIDS ON PATTERNED SELF-ASSEMBLED MONOLAYERS OF ALKANETHIOLATES ON GOLD [J].

BIEBUYCK, HA ;

WHITESIDES, GM .

LANGMUIR, 1994, 10 (08) :2790-2793

[2] FABRICATION OF SUBMICROMETER FEATURES ON CURVED SUBSTRATES BY MICROCONTACT PRINTING [J].

JACKMAN, RJ ;

WILBUR, JL ;

WHITESIDES, GM .

SCIENCE, 1995, 269 (5224) :664-666

[3] PATTERNED SELF-ASSEMBLED MONOLAYERS FORMED BY MICROCONTACT PRINTING DIRECT SELECTIVE METALIZATION BY CHEMICAL-VAPOR-DEPOSITION ON PLANAR AND NONPLANAR SUBSTRATES [J].

JEON, NL ;

NUZZO, RG ;

XIA, YN ;

MRKSICH, M ;

WHITESIDES, GM .

LANGMUIR, 1995, 11 (08) :3024-3026

[4] COMBINING PATTERNED SELF-ASSEMBLED MONOLAYERS OF ALKANETHIOLATES ON GOLD WITH ANISOTROPIC ETCHING OF SILICON TO GENERATE CONTROLLED SURFACE MORPHOLOGIES [J].

KIM, E ;

KUMAR, A ;

WHITESIDES, GM .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (02) :628-633

[5] POLYMER MICROSTRUCTURES FORMED BY MOLDING IN CAPILLARIES [J].

KIM, E ;

XIA, YN ;

WHITESIDES, GM .

NATURE, 1995, 376 (6541) :581-584

[6] PATTERNED CONDENSATION FIGURES AS OPTICAL DIFFRACTION GRATINGS [J].

KUMAR, A ;

WHITESIDES, GM .

SCIENCE, 1994, 263 (5143) :60-62

[7] PATTERNING SELF-ASSEMBLED MONOLAYERS - APPLICATIONS IN MATERIALS SCIENCE [J].

KUMAR, A ;

BIEBUYCK, HA ;

WHITESIDES, GM .

LANGMUIR, 1994, 10 (05) :1498-1511

[8] FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING [J].

KUMAR, A ;

WHITESIDES, GM .

APPLIED PHYSICS LETTERS, 1993, 63 (14) :2002-2004

[9] COMPARISON OF THE STRUCTURES AND WETTING PROPERTIES OF SELF-ASSEMBLED MONOLAYERS OF NORMAL-ALKANETHIOLS ON THE COINAGE METAL-SURFACES, CU, AG, AU [J].

LAIBINIS, PE ;

WHITESIDES, GM ;

ALLARA, DL ;

TAO, YT ;

PARIKH, AN ;

NUZZO, RG .

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1991, 113 (19) :7152-7167

[10] The self-assembly mechanism of alkanethiols on Au(111) [J].

Poirier, GE ;

Pylant, ED .

SCIENCE, 1996, 272 (5265) :1145-1148