Work function change on O-plasma treated indium-tin-oxide

被引：15

作者：

Kim, GY ^{[1
]}

Oh, JS ^{[1
]}

Choi, EH ^{[1
]}

Cho, GS ^{[1
]}

Kang, SO ^{[1
]}

Cho, J ^{[1
]}

机构：

[1] Kwangwoon Univ, Dept Electrophys, Seoul 139701, South Korea

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2003年 / 100卷 / 03期

关键词：

work function; Indium-tin-oxide; O-plasma; gamma-focused ion beam; Auger electron spectroscopy;

D O I：

10.1016/S0921-5107(03)00115-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The change in work function was studied on Indium-tin-oxide (ITO) surface after O-plasma treatment using gamma-focused ion beam (gamma-FIB). As the surface of ITO experienced more O-plasma treatment, both the surface resistivity and the work function got higher. Auger electron spectroscopy identified the increase of oxygen as well as the decrease of Sn. The rise of work function and surface resistivity is considered to be due to the change in oxygen and Sn on the surface of ITO. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：275 / 279

页数：5

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