Observation of submicron dust particles trapped in a diffused region of a low pressure radio frequency plasma

被引：26
作者：
Hayashi, N [1 ]
机构：
[1] Saga Univ, Fac Sci & Engn, Saga 8408502, Japan
来源：
PHYSICS OF PLASMAS | 2001年 / 8卷 / 06期
关键词：
D O I：
10.1063/1.1371237
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
Submicron dust particles (Cu, phi 50 nm) were observed to be trapped in an rf plasma at relatively low pressure. The laser light scattering by particles shows the time evolution of the dust particles for several hours after pulsed injection of the particles. The dust particles were localized in the diffused region as a large volume cloud. The suspension mechanism of the dust particles in the diffused plasma was explained by an electrostatic force due to the potential structure. The spatial distribution of the charge of the dust particles was determined by this potential structure. The dispersion relations of the self-excited dust acoustic waves were adopted to confirm the spatial distribution and the time evolution of the charge of the dust particles. (C) 2001 American Institute of Physics.
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收藏
页码：3051 / 3057
页数：7
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