Gate-all-around twin silicon nanowire SONOS memory

被引：26

作者：

Suk, Sung Dae ^{[1
]}

Yeo, Kyoung Hwan ^{[1
]}

Cho, Keun Hwi ^{[1
]}

Li, Ming ^{[1
]}

Yeoh, Yun young ^{[1
]}

Hong, Ki-Ha ^{[4
]}

Kim, Sung-Han ^{[3
]}

Koh, Young-Ho ^{[2
]}

Jung, Sunggon ^{[2
]}

Jang, WonJun ^{[2
]}

Kim, Dong-Won ^{[1
]}

Park, Donggun ^{[1
]}

Ryu, Byung-Il ^{[1
]}

机构：

[1] Samsung Elect Co, Device Res Team, San 24, Yongin 449711, Kyoungi Do, South Korea

[2] Samsung Elect Co, PD Team, Yongin 449711, Kyoungi Do, South Korea

[3] Samsung Elect Co, Team MTT2, Yongin 449711, Kyoungi Do, South Korea

[4] SAIT, Yongin 449711, Kyoungi Do, South Korea

来源：

2007 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS | 2007年

关键词：

D O I：

10.1109/VLSIT.2007.4339760

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed gate-all-around (GAA) SONOS with ultra thin twin silicon nanowires for the first time. By using channel hot electron injection (CHEI) and hot hole injection (HHI) mechanisms, program speed of 1 mu s at V-d=2 V, V-g =6 V and erase speed of 1 ms at V-d=4.5 V, V-g=-6 V are achieved with 2 similar to 3 nm nanowire and 30 nm gate. Nanowire size below 10 nm dependencies on V, shift (AV,) and the program/erase (P/E) characteristics are investigated. As nanowire diameter (d(nw)) decreases, faster program speed and larger Delta V-th are observed.

引用

页码：142 / +

页数：2

共 8 条

[1] Cho ES, 2005, 2005 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS, P208
[2] Choi BY, 2005, 2005 Symposium on VLSI Technology, Digest of Technical Papers, P118
[3] Hot carrier reliability study in body-tied fin-type field effect transistors
Han, Jin-Woo
Lee, Choong-Ho
Park, Donggun
Choi, Yang-Kyu
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (4B): : 3101 - 3105
[4] Lee S. H., 2006, IEDM, P33
[5] LIBSCH FR, 1998, SONOS NONVOLATILE SE, P309
[6] OH CW, 2006, S VLSI TECH, P50
[7] SALVO BD, 2004, TDMR, V4, P377
[8] Suk SD, 2005, INT EL DEVICES MEET, P735

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