Case study for root cause analysis of yield problems

被引：10

作者：

Malinaric, D ^{[1
]}

Hoffmeister, RR ^{[1
]}

Sun, C ^{[1
]}

机构：

[1] Atmel Corp, Colorado Springs, CO USA

来源：

2000 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP | 2000年

关键词：

yield analysis software; Klarity ACE; processing tool analysis; commonality study; tool variance; advanced RAD software for semiconductor applications;

D O I：

10.1109/ASMC.2000.902551

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

New RAD (rapid application development) tools, software and high performance database technology enable development of analysis software that performs tasks that were either too complex or time-consuming with older technology. The Klarity ACE (Advanced Correlation Engine) software package was specifically developed to meet the analysis needs of practicing semiconductor professionals. It can be applied to the needs of yield, product, development, and test engineers and also provides many tools for process engineers to analyze detailed processing equipment data such as chamber etch, rates, gas flows, and equipment-related data. Besides supplying tools for routine analysis tasks such as making control and capability charts; advanced features such as commonality analyses and tool variance and sensitivity are included.

引用

页码：8 / 13

页数：6