[1] Nagoya Univ, Grad Sch Engn, Dept Micronano Mech Sci & Engn, Chikusa Ku, Furo Cho, Nagoya, Aichi 4648603, Japan
[2] Nippon ITF Inc, Technol Dev Ctr, Ukyo Ku, 47 Umesu Takase Cho, Kyoto 6158686, Japan
[3] Univ Teknikal Malaysia Melaka, Fac Mech & Mfg Engn Technol, Durian Tunggal 76100, Melaka, Malaysia