Silicon waveguides and ring resonators at 5.5 μm

被引：95

作者：

Spott, Alexander ^{[1
]}

Liu, Yang ^{[1
]}

Baehr-Jones, Tom ^{[1
]}

Ilic, Rob ^{[2
]}

Hochberg, Michael ^{[1
]}

机构：

[1] Univ Washington, Dept Elect Engn, Seattle, WA 98195 USA

[2] Cornell Univ, Cornell NanoScale Sci & Technol Facil, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2010年 / 97卷 / 21期

关键词：

D O I：

10.1063/1.3514234

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate low loss ridge waveguides and the first ring resonators for the mid-infrared, for wavelengths ranging from 5.4 to 5.6 mu m. Structures were fabricated using electron-beam lithography on the silicon-on-sapphire material system. Waveguide losses of 4.0 +/- 0.7 dB/cm are achieved, as well as Q-values of 3.0 k. (C) 2010 American Institute of Physics. [doi:10.1063/1.3514234]

引用

页数：3

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