Development and characterization of silicon dioxide clad silicon carbide optics for terrestrial and space applications

被引:12
作者
Jalluri, Tayaramma D. P. V. [1 ,2 ]
Gouda, Girish M. [1 ]
Dey, Arjun [3 ]
Rudraswamy, B. [2 ]
Sriram, K. V. [1 ]
机构
[1] Indian Space Res Org, Lab Electroopt Syst LEOS, Bengaluru 560058, India
[2] Bangalore Univ, Dept Phys, Mysore Rd,Jnana Bharathi Campus, Bengaluru 560056, India
[3] Indian Space Res Org, Thermal Syst Grp, UR Rao Satellite Ctr, Bengaluru 560017, India
关键词
Sintered SiC; SiO2; coating; Interferometry; Micro-roughness; Surface-figure; Telescope optics; THIN-FILMS; ROUGHNESS MEASUREMENT; RAPID FABRICATION; ELASTIC-MODULUS; STRENGTH; HARDNESS; MICROSTRUCTURE; TELESCOPE; CERAMICS; CARBON;
D O I
10.1016/j.ceramint.2021.09.085
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Silicon carbide (SiC), a non-oxide ceramic with superior thermo-mechanical stability, chemical and radiation resistive properties, finds extensive utilization in optical instruments for terrestrial and space applications. However, its inherent porous texture (alpha-HCP) becomes a deterrent for high-performance optical telescopes, although several techniques of surface alterations over sintered or reaction-bonded SiC are available. In the present work, the physical vapour deposition (PVD) technique is adopted to deposit a thick (similar to 5 mu m) Silicon dioxide (SiO2) clad layer on a sintered and optically polished SiC (SSiC) substrate. SiO2 clad layer coated SSiC (SDO-SSiC) substrate reduces the surface porosity of SSiC which is found to be suitable for optical mirror application. Finally, an Al based reflective and oxides protective coatings are deposited on SiO2 clad layer to achieve reflective behaviour. The surface figure of 75 nm PV (peak-to-valley) and less than 2 nm surface microroughness values are achieved which meets the stringent optical telescope specifications for terrestrial and space applications. The structural and nano-mechanical properties of presently developed SiO2 clad layer-based SiC telescopic mirror have been characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-Ray Analysis (EDX), atomic force microscopy (AFM), and nanoindentation techniques. The optical properties are investigated by optical profilometry and wavelength based spectrometric (both in visible and infrared ranges) techniques. Finally, space worthiness studies viz., thermo-vacuum, thermal storage, thermal shock and relative humidity tests have been carried out successfully. The process of cleaning, grinding and polishing at each substrate preparation stage and coatings are also reported comprehensively.
引用
收藏
页码:96 / 110
页数:15
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