On absolute calibration with xenon of laser diagnostic methods based on two-photon absorption

被引：97

作者：

Goehlich, A ^{[1
]}

Kawetzki, T ^{[1
]}

Döbele, HF ^{[1
]}

机构：

[1] Univ Essen Gesamthsch, Inst Laser & Plasmaphys, D-45117 Essen, Germany

来源：

JOURNAL OF CHEMICAL PHYSICS | 1998年 / 108卷 / 22期

关键词：

D O I：

10.1063/1.476388

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A novel calibration method for the determination of absolute species densities by laser spectroscopy with two-photon absorption is presented. The method is based on a comparative measurement with a noble gas which has a two-photon resonance spectrally close to the transition investigated. Application of this scheme for the calibration of LIF measurements to determine atomic oxygen, generated in a capacitively coupled rf reactor, and for calibration of a RIS measurement of atomic oxygen and carbon generated by sputtering is demonstrated. The relevant excitation cross section of the involved 7p[3/2](2) xenon state, which is used for calibration of atomic oxygen densities, is determined. (C) 1998 American Institute of Physics.

引用

页码：9362 / 9370

页数：9

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