Refractive index and extinction coefficient dependence of thin Al and Ir films on deposition technique and thickness

被引：60

作者：

Lehmuskero, Anni ^{[1
]}

Kuittinen, Markku ^{[1
]}

Vahimaa, Pasi ^{[1
]}

机构：

[1] Univ Joensuu, Dept Math & Phys, FI-80101 Joensuu, Finland

来源：

OPTICS EXPRESS | 2007年 / 15卷 / 17期

关键词：

D O I：

10.1364/OE.15.010744

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We show that the optical properties of thin metallic films depend on the thickness of the film as well as on the deposition technique. Several thicknesses of electron-beam-gun-evaporated aluminium films were measured and the refractive index and the extinction coefficient defined using ellipsometry. In addition, the refractive indexes and the extinction coefficients of atomic-layer-deposited iridium were compared with those of evaporated iridium samples. (c) 2007 Optical Society of America

引用

页码：10744 / 10752

页数：9

共 12 条

[1] Accessing the optical nonlinearity of metals with metal-dielectric photonic bandgap structures [J].

Bennink, RS ;

Yoon, YK ;

Boyd, RW ;

Sipe, JE .

OPTICS LETTERS, 1999, 24 (20) :1416-1418

[2]

CANFIELD BK, 1999, J OPT A-PURE APPL OP, V24, P1416

[3]

Chopra K. L, 1979, THIN FILM PHENOMENA

[4]

Edwards D.F., 1985, Handbook of optical constants of solids

[5] REFLECTANCE OF EVAPORATED ALUMINUM IN THE VACUUM ULTRAVIOLET [J].

HASS, G ;

HUNTER, WR ;

TOUSEY, R .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1956, 46 (12) :1009-1012

[6] Inductive grid filters for rejection of infrared radiation [J].

Jefimovs, K ;

Vallius, T ;

Kettunen, V ;

Kuittinen, M ;

Turunen, J ;

Vahimaa, P ;

Kaipiainen, M ;

Nenonen, S .

JOURNAL OF MODERN OPTICS, 2004, 51 (11) :1651-1661

[7] Giant optical activity in quasi-two-dimensional planar nanostructures [J].

Kuwata-Gonokami, M ;

Saito, N ;

Ino, Y ;

Kauranen, M ;

Jefimovs, K ;

Vallius, T ;

Turunen, J ;

Svirko, Y .

PHYSICAL REVIEW LETTERS, 2005, 95 (22)

[8]

Lee E, 2006, SEMICONDUCTOR INT

[9]

Press W. H., 1992, NUMERICAL RECIPES C, V2nd ed., P994

[10] Structure evolution during processing of polycrystalline films [J].

Thompson, CV .

ANNUAL REVIEW OF MATERIALS SCIENCE, 2000, 30 :159-190

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