Design and engineering of Mn conical sculptured thin films as both electrodes for a gas sensor: ionization and field emission studies

被引:69
作者
Chahshouri, Fatemeh [1 ]
Savaloni, Hadi [1 ]
Khani, Elahe [1 ]
Savari, Rojan [1 ]
机构
[1] Univ Tehran, Sch Phys, Coll Sci, North Kargar St, Tehran 1439955961, Iran
基金
美国国家科学基金会;
关键词
gas ionization sensor; field emission; Paschen's law; Mn sculptured thin film; selectivity; sensitivity; MICROMETER SEPARATIONS; ELECTRICAL BREAKDOWN; ZNO NANOWIRE; PASCHENS LAW; AIR; FABRICATION; CATHODE;
D O I
10.1088/1361-6439/ab896e
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Paschen's law and deviation from Paschen's law are studied in a face to face gas sensor based on Mn helical sculptured thin films with conical shape as cathode and anode electrodes. The sensor's performance was investigated at dynamic pressures ranging from 0.1 to 1000 mbar and 3 to 200 mu m gaps between the two electrodes and for nitrogen, air and carbon monoxide gases. Results showed that at distances more than 10 mu m the Paschen's law is satisfied but at lower than 10 mu m distances between the two electrodes and pressures more than 250 mbar deviations occur from the Paschen's law. Selectivity results of the sensor showed that under all conditions studied in this work and for all gases there is a good resolution between the results and this enhances with gas pressure. Comparison of the results of the present sensor with those reported in the literature showed higher sensitivity of the present work for different gases investigated.
引用
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页数:14
相关论文
共 51 条
[1]   An optical gas sensor based on polyaniline Langmuir-Blodgett films [J].
Agbor, NE ;
Cresswell, JP ;
Petty, MC ;
Monkman, AP .
SENSORS AND ACTUATORS B-CHEMICAL, 1997, 41 (1-3) :137-141
[2]  
Arshak K., 2004, Sensor Review, V24, P181, DOI 10.1108/02602280410525977
[3]  
BOYLE WS, 1955, PHYS REV, V97, P255, DOI 10.1103/PhysRev.97.255
[4]   Graphene-metal oxide nanohybrids for toxic gas sensor: A review [J].
Chatterjee, Shyamasree Gupta ;
Chatterjee, Somenath ;
Ray, Ajoy K. ;
Chakraborty, Amit K. .
SENSORS AND ACTUATORS B-CHEMICAL, 2015, 221 :1170-1181
[5]   Electrical breakdown phenomena for devices with micron separations [J].
Chen, Ching-Heng ;
Yeh, J. Andrew ;
Wang, Pei-Jen .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (07) :1366-1373
[6]   Nanowire-based gas sensors [J].
Chen, Xianping ;
Wong, Cell K. Y. ;
Yuan, Cadmus A. ;
Zhang, Guoqi .
SENSORS AND ACTUATORS B-CHEMICAL, 2013, 177 :178-195
[7]   Electric field breakdown at micrometre separations in air and nitrogen at atmospheric pressure [J].
Dhariwal, RS ;
Torres, JM ;
Desmulliez, MPY .
IEE PROCEEDINGS-SCIENCE MEASUREMENT AND TECHNOLOGY, 2000, 147 (05) :261-265
[8]  
Eckertova L., 1986, PHYSICS OF THIN FILM
[9]   ZnO nanowire field-effect transistor and oxygen sensing property [J].
Fan, ZY ;
Wang, DW ;
Chang, PC ;
Tseng, WY ;
Lu, JG .
APPLIED PHYSICS LETTERS, 2004, 85 (24) :5923-5925
[10]   Metal Oxide Semi-Conductor Gas Sensors in Environmental Monitoring [J].
Fine, George F. ;
Cavanagh, Leon M. ;
Afonja, Ayo ;
Binions, Russell .
SENSORS, 2010, 10 (06) :5469-5502