Inductively coupled MEMS-based micro RFID transponder

被引：0

作者：

Lu, Hong M. ^{[1
]}

Goldsmith, Chuck ^{[2
]}

Lee, Jeong-Bong ^{[1
]}

机构：

[1] Univ Texas, Dept Elect Engn, 2601 N Floyd Rd,EC 33, Richardson, TX 75083 USA

[2] MEMtron Inc, Plano, TX 75083 USA

来源：

SMART SENSORS, ACTUATORS, AND MEMS III | 2007年 / 6589卷

关键词：

D O I：

10.1117/12.722096

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present the design, fabrication and characterization of an inductively-coupled miniaturized RFID transponder using MEMS technology. The micromachined miniaturized transponder consists of a small solenoid inductor with a high permeability magnetic core, a chip capacitor and a RFID chip. They are integrated onto a micromachined SU-8 polymer substrate and it is operated in the frequency range of 13.56 to 27 MHz. Induced voltages of up to 4 V were obtained with a miniaturized 500 nH transponder coil from a 2.2 mu H reader coil at 5 mm distance based on a resonant magnetic coupling mechanism. The assembled transponder was tested using a commercial RFID reader at 13.56 MHz and successful communication was established at a distance of 10 mm.

引用

页数：8