Impact of the Oxygen Flow during the Magnetron Sputtering Deposition on the Indium Tin Oxide thin films for Silicon Heterojunction Solar Cell
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Aissa, Brahim
[1
]
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Zakaria, Yahya
[1
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Abdallah, Amir A.
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Hamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, QatarHamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Abdallah, Amir A.
[1
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Kivambe, Maulid M.
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Hamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, QatarHamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Kivambe, Maulid M.
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Samara, Ayman
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Hamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, QatarHamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Samara, Ayman
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Shetty, Akshath Raghu
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Hamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, QatarHamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Shetty, Akshath Raghu
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Cattin, Jean
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Ecole Polytech Fed Lausanne, Inst Microengn, Photovolta & Thin Film Elect Lab PV Lab, Rue Maladiere 71B, CH-2002 Neuchatel, SwitzerlandHamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Cattin, Jean
[2
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Haschke, Jan
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Ecole Polytech Fed Lausanne, Inst Microengn, Photovolta & Thin Film Elect Lab PV Lab, Rue Maladiere 71B, CH-2002 Neuchatel, SwitzerlandHamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Haschke, Jan
[2
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Boccard, Mathieu
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Ecole Polytech Fed Lausanne, Inst Microengn, Photovolta & Thin Film Elect Lab PV Lab, Rue Maladiere 71B, CH-2002 Neuchatel, SwitzerlandHamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Boccard, Mathieu
[2
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Ballif, Christophe
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Ecole Polytech Fed Lausanne, Inst Microengn, Photovolta & Thin Film Elect Lab PV Lab, Rue Maladiere 71B, CH-2002 Neuchatel, SwitzerlandHamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Ballif, Christophe
[2
]
机构:
[1] Hamad bin Khalifa Univ, Qatar Fdn, Qatar Environm & Energy Res Inst, POB 34110, Doha, Qatar
Silicon Heterojunction;
Indium Tin Oxide;
Magnetron sputtering;
ToF-SIMS;
ELECTRICAL-PROPERTIES;
AMORPHOUS-SILICON;
CARRIER TRANSPORT;
WORK FUNCTION;
SPECTROSCOPY;
PERFORMANCE;
D O I:
10.1109/pvsc40753.2019.8980906
中图分类号:
TE [石油、天然气工业];
TK [能源与动力工程];
学科分类号:
0807 ;
0820 ;
摘要:
We report on the optoelectronic properties of ITO layers deposited by DC sputtering, using different oxygen to total flow ratios [r(O-2) = O-2/Ar, ranging from 1% to 8%], for silicon heterojunction (SHJ) solar cell application. The depth profiling of the various elements throughout the thicknesses and interfaces of the ITOs and thin films forming the SHJ device was determined by time-of-flight secondary ion mass spectrometry. Finally, the photovoltaic performance of the fabricated SHJ cells was evaluated with respect to the r(O-2) into the ITO layers. Lower r(O-2) was found to yield the best PV performance which is attributed to lower parasitic resistive losses.
机构:
Beihang Univ, Dept Phys, Beijing 100191, Peoples R China
Leshan Vocat & Tech Coll, Sch New Energy Engn, Leshan 614000, Peoples R ChinaBeihang Univ, Dept Phys, Beijing 100191, Peoples R China
Chen, Aqing
;
Zhu, Kaigui
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机构:
Beihang Univ, Dept Phys, Beijing 100191, Peoples R ChinaBeihang Univ, Dept Phys, Beijing 100191, Peoples R China
机构:
Beihang Univ, Dept Phys, Beijing 100191, Peoples R China
Leshan Vocat & Tech Coll, Sch New Energy Engn, Leshan 614000, Peoples R ChinaBeihang Univ, Dept Phys, Beijing 100191, Peoples R China
Chen, Aqing
;
Zhu, Kaigui
论文数: 0引用数: 0
h-index: 0
机构:
Beihang Univ, Dept Phys, Beijing 100191, Peoples R ChinaBeihang Univ, Dept Phys, Beijing 100191, Peoples R China