The pairing-dependent effects of laser surface texturing on micro tribological behavior of amorphous carbon film

被引:35
作者
Ding, Qi [1 ,2 ]
Wang, Liping [1 ]
Hu, Litian [1 ]
Hu, Tianchang [1 ,2 ]
Wang, Ying [1 ,2 ]
机构
[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
基金
中国国家自然科学基金;
关键词
Amorphous carbon; Laser surface texturing; Micro-tribology; Graphitization; THIN-FILMS; DLC; FRICTION; MEMS; NANOTRIBOLOGY; ADHESION;
D O I
10.1016/j.wear.2011.08.008
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
In this paper, a kind of textured amorphous carbon film with the pattern of micro dots matrix was developed by irradiating amorphous carbon film with Nd-yttrium aluminum garnet laser system. Confirmed by the characterizations is that the produced micro dots are protuberant and in nanocrystalline graphite phase with a porous structure and reduced hardness. The micro tribological behavior of textured film was studied experimentally using steel balls and Si3N4 balls as the counter body. It turns out that the influences of laser treatment on the tribological performance of amorphous carbon film are strongly dependent on the friction pairs. By specially probing into the effects of localized micro graphite bulges, possible friction reduction mechanisms are discussed. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:43 / 49
页数:7
相关论文
共 24 条
  • [1] Different carbon based thin films and their microtribological behaviour in MEMS applications
    Bandorf, R
    Lüthje, H
    Henke, C
    Wiebe, J
    Sick, JH
    Küster, R
    [J]. SURFACE & COATINGS TECHNOLOGY, 2005, 200 (5-6) : 1777 - 1782
  • [2] Tribological behaviour of thin a-C and a-C:H films with different topographic structure under rotating and oscillating motion for dry lubrication
    Bandorf, R
    Lüthje, H
    Henke, C
    Sick, JH
    Küster, R
    [J]. SURFACE & COATINGS TECHNOLOGY, 2004, 188 : 530 - 533
  • [3] Influencing factors on microtribology of DLC films for MEMS and microactuators
    Bandorf, R
    Lüthje, H
    Staedler, T
    [J]. DIAMOND AND RELATED MATERIALS, 2004, 13 (4-8) : 1491 - 1493
  • [4] Influence of substrate material and topography on the tribological behaviour of submicron coatings
    Bandorf, R
    Lüthje, H
    Wortmann, A
    Staedler, T
    Wittorf, R
    [J]. SURFACE & COATINGS TECHNOLOGY, 2003, 174 : 461 - 464
  • [5] Adhesion and stiction: Mechanisms, measurement techniques, and methods for reduction
    Bhushan, B
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (06): : 2262 - 2296
  • [6] Tribology on the macroscale to nanoscale of microelectromechanical system materials: A review
    Bhushan, B.
    [J]. Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, 2001, 215 (01) : 1 - 18
  • [7] Bhushan B., 2006, INTRO TRIBOLOGY
  • [8] Nanotribology and nanomechanics in nano/biotechnology
    Bhushan, Bharat
    [J]. PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2008, 366 (1870): : 1499 - 1537
  • [9] Hydrophobicity, adhesion, and friction properties of nanopatterned polymers and scale dependence for micro- and nanoelectromechanical systems
    Burton, Z
    Bhushan, B
    [J]. NANO LETTERS, 2005, 5 (08) : 1607 - 1613
  • [10] An explanation for laser-induced spallation effect in a-C:H films: Altered phase evolution route caused by hydrogen doping
    Ding, Qi
    Wang, Liping
    Hu, Litian
    Hu, Tianchang
    Wang, Yunfeng
    Zhang, Yaonan
    [J]. JOURNAL OF APPLIED PHYSICS, 2011, 109 (01)