The pairing-dependent effects of laser surface texturing on micro tribological behavior of amorphous carbon film

被引：35

作者：

Ding, Qi ^{[1
,2
]}

Wang, Liping ^{[1
]}

Hu, Litian ^{[1
]}

Hu, Tianchang ^{[1
,2
]}

Wang, Ying ^{[1
,2
]}

机构：

[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China

来源：

WEAR | 2012年 / 274卷

基金：

中国国家自然科学基金;

关键词：

Amorphous carbon; Laser surface texturing; Micro-tribology; Graphitization; THIN-FILMS; DLC; FRICTION; MEMS; NANOTRIBOLOGY; ADHESION;

D O I：

10.1016/j.wear.2011.08.008

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

In this paper, a kind of textured amorphous carbon film with the pattern of micro dots matrix was developed by irradiating amorphous carbon film with Nd-yttrium aluminum garnet laser system. Confirmed by the characterizations is that the produced micro dots are protuberant and in nanocrystalline graphite phase with a porous structure and reduced hardness. The micro tribological behavior of textured film was studied experimentally using steel balls and Si3N4 balls as the counter body. It turns out that the influences of laser treatment on the tribological performance of amorphous carbon film are strongly dependent on the friction pairs. By specially probing into the effects of localized micro graphite bulges, possible friction reduction mechanisms are discussed. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：43 / 49

页数：7

共 24 条

[1] Different carbon based thin films and their microtribological behaviour in MEMS applications [J].