Fabrication of ultraviolet photoconductive sensor using a novel aluminium-doped zinc oxide nanorod-nanoflake network thin film prepared via ultrasonic-assisted sol-gel and immersion methods

被引:99
作者
Mamat, M. H. [1 ]
Khusaimi, Z. [2 ]
Musa, M. Z. [1 ]
Malek, M. F. [1 ,2 ]
Rusop, M. [1 ,2 ]
机构
[1] Univ Teknol MARA UiTM, Fac Elect Engn, NANO Elect Ctr NET, Shah Alam 40450, Selangor, Malaysia
[2] Univ Teknol MARA UiTM, Inst Sci IOS, NANO SciTech Ctr NST, Shah Alam 40450, Selangor, Malaysia
关键词
Semiconductors; ZnO; Nanorods; Nanoflake; Thin films; Sol-gel preparation; UV sensor; ZNO NANORODS; OPTICAL-PROPERTIES; PHOTOLUMINESCENCE PROPERTIES; GROWTH; ARRAYS; SUBSTRATE; SILICON; UV;
D O I
10.1016/j.sna.2011.07.002
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Unique and novel thin films with aluminium (Al)-doped zinc oxide (ZnO) nanostructures consisting of nanorod-nanoflake networks were prepared for metal-semiconductor-metal (MSM)-type ultraviolet (UV) photoconductive sensor applications. These nanostructures were grown on a glass substrate coated with a seed layer using a combination of ultrasonic-assisted sol-gel and immersion methods. The synthesised ZnO nanorods had diameters varying from 10 to 40 nm. Very thin nanoflake structures were grown vertically and horizontally on top of the nanorod array. The thin film had good ZnO crystallinity with a root mean square roughness of approximately 13.59 nm. The photocurrent properties for the Al-doped ZnO nanorod-nanoflake thin films were more than 1.5 times greater than those of the seed layer when the sensor was illuminated with 365 nm UV light at a density of 5 mA/cm(2). The responsivity of the device was found to be dependent on the bias voltage. We found that similar photocurrent curves were produced over eight cycles, which indicated that the UV sensing capability of the fabricated sensor was highly reproducible. Our results provide a new approach for utilising the novel structure of Al-doped ZnO thin films with a nanorod-nanoflake network for UV sensor applications. To the best of our knowledge, UV photoconductive sensors using Al-doped ZnO thin films with a nanorod-nanoflake network have not yet been reported. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:241 / 247
页数:7
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